Ⅰ、HOC 6101 series
Resist Film Thickness:1.5-7um
Property:
1. Low curing temperature(60℃)
2. High transmittance(T%>98)
3. Low consumption(low film thickness)
4. High temperature resistant laser cutting
5. Acid recasting resistant
6. Low alkalinity solution stripping
Ⅱ、Application Fields:
1. Stealth Laser Dicing:
For ultra-thin silicon memory chips, CIS sensors and WLCSP advanced packaging. It provides thermal insulation and prevents circuit delamination.
2. UV Laser Ablation Scribing:
Suitable for SiC, GaN, sapphire LED wafers, glass and compound semiconductors. It effectively absorbs massive high-temperature molten residues.
3. Laser Blind Trench & Isolation Grooving:
Applied to TSV wafers, isolation trenches for power chips and RF substrates, restraining carbonization of metal at trench openings.
4. Combined Laser Dicing & Plasma Process:
For automotive-grade SiC devices and high-end optical communication chips. The protective coating features excellent plasma resistance and can be fully cleaned off via water washing without residues.