Sapphire Substrate Polishing Slurry

Sapphire Substrate Polishing Slurry is a water-based slurry specially formulated for chemical mechanical polishing (CMP) of single-crystal sapphire (α-Al₂O₃). It serves as a core consumable for the manufacturing of LEDs, Mini/Micro-LEDs, RF semiconductors and optical windows.Sapphire features high hardness and strong chemical inertness. Mechanical grinding alone tends to induce scratches and subsurface damage. This polishing slurry combines chemical etching softening and abrasive micro-cutting t

产品详情

Application Fields:

Main processing targets include 2/4/6/8-inch C-plane sapphire substrates (the mainstream material for LEDs), as well as A-plane and C-plane optical wafers.

This product is also applicable to mirror polishing of certain metals, glass, ceramics and other materials.


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